主讲人：Professor Hoang-Phuong Phan
时间：2025年1月8日（周三）上午10:00
地点：中心校区半导体研发大楼第一会议室
报告摘要
Wide bandgap materials such as silicon carbide, III-Nitride, and diamond-like carbon are considered the post-silicon era semiconductors. Their superior physical and chemical properties offer unique functionalities for several industrial applications. Among these, SiC emerges as a strong candidate thanks to its large breakdown voltages, facilitating the development of high-power electronic devices currently used in solar power modules and electric vehicle drive converters.
Advancements in the synthesis of nanothin films of SiC on large-scale Si wafers have broadened its utilization, especially in the field of Nano Electromechanical Systems . The high temperature tolerance, chemical inertness, and mechanical flexibility of SiC nanothin films enable a new cluster of NEMS devices that can be used under extreme environments where Si-based counterparts cannot properly operate.
This talk will provide an overview of our recent findings on the physics of SiC nanomembranes, engineering routes to micromachine 2D and 3D SiC structures, and highlights of their applications in energy, structural health monitoring, and personalized healthcare.
个人简介
Hoang-Phuong Phan is an Associate Professor and ARC Future Fellow at the School of Mechanical and Manufacturing Engineering, UNSW Sydney. His research spans a broad range of semiconductor devices and applications, including MEMS/NEMS, integrated sensors, flexible electronics, and three-dimensional micro-architectures. He graduated from The University of Tokyo for Bachelor and Master Degree and PhD from Griffith University. Prof. Phan has published over 140 journal articles. He was honored with the GU publication award, the Springer outstanding theses award, the Australian Nanotechnology Network Fellowship, GU Postdoctoral Fellowship, the DECRA award, the Pro Vice-Chancellor ECR award (2019), the Griffith Vice-Chancellor Excellence in Research Award for ECR (2020), the GROW award from UNSW, and the Future Fellow from the Australian Research Council in 2024. He serves in the Executive Technical Program Committee of the IEEE International Conferences on Micro Electro Mechanical Systems (IEEE MEMS).
